JPS4885140A - - Google Patents
Info
- Publication number
- JPS4885140A JPS4885140A JP47014855A JP1485572A JPS4885140A JP S4885140 A JPS4885140 A JP S4885140A JP 47014855 A JP47014855 A JP 47014855A JP 1485572 A JP1485572 A JP 1485572A JP S4885140 A JPS4885140 A JP S4885140A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47014855A JPS5234215B2 (fr) | 1972-02-14 | 1972-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47014855A JPS5234215B2 (fr) | 1972-02-14 | 1972-02-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4885140A true JPS4885140A (fr) | 1973-11-12 |
| JPS5234215B2 JPS5234215B2 (fr) | 1977-09-02 |
Family
ID=11872632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47014855A Expired JPS5234215B2 (fr) | 1972-02-14 | 1972-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5234215B2 (fr) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53116902A (en) * | 1977-03-22 | 1978-10-12 | Michiya Kk | Method of engraving one direction expanding or shortening of printing plate and device therefor |
| JPS5938748A (ja) * | 1982-08-28 | 1984-03-02 | Dainippon Printing Co Ltd | 露光方法 |
| JPH0448542U (fr) * | 1990-08-29 | 1992-04-24 | ||
| WO2013164939A1 (fr) * | 2012-05-01 | 2013-11-07 | 株式会社ニコン | Dispositif de traitement de substrat |
-
1972
- 1972-02-14 JP JP47014855A patent/JPS5234215B2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53116902A (en) * | 1977-03-22 | 1978-10-12 | Michiya Kk | Method of engraving one direction expanding or shortening of printing plate and device therefor |
| JPS571825B2 (fr) * | 1977-03-22 | 1982-01-13 | ||
| JPS5938748A (ja) * | 1982-08-28 | 1984-03-02 | Dainippon Printing Co Ltd | 露光方法 |
| JPH0448542U (fr) * | 1990-08-29 | 1992-04-24 | ||
| WO2013164939A1 (fr) * | 2012-05-01 | 2013-11-07 | 株式会社ニコン | Dispositif de traitement de substrat |
| JPWO2013164939A1 (ja) * | 2012-05-01 | 2015-12-24 | 株式会社ニコン | 基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5234215B2 (fr) | 1977-09-02 |