JPS4885140A - - Google Patents

Info

Publication number
JPS4885140A
JPS4885140A JP47014855A JP1485572A JPS4885140A JP S4885140 A JPS4885140 A JP S4885140A JP 47014855 A JP47014855 A JP 47014855A JP 1485572 A JP1485572 A JP 1485572A JP S4885140 A JPS4885140 A JP S4885140A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47014855A
Other languages
Japanese (ja)
Other versions
JPS5234215B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47014855A priority Critical patent/JPS5234215B2/ja
Publication of JPS4885140A publication Critical patent/JPS4885140A/ja
Publication of JPS5234215B2 publication Critical patent/JPS5234215B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP47014855A 1972-02-14 1972-02-14 Expired JPS5234215B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47014855A JPS5234215B2 (enrdf_load_stackoverflow) 1972-02-14 1972-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47014855A JPS5234215B2 (enrdf_load_stackoverflow) 1972-02-14 1972-02-14

Publications (2)

Publication Number Publication Date
JPS4885140A true JPS4885140A (enrdf_load_stackoverflow) 1973-11-12
JPS5234215B2 JPS5234215B2 (enrdf_load_stackoverflow) 1977-09-02

Family

ID=11872632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47014855A Expired JPS5234215B2 (enrdf_load_stackoverflow) 1972-02-14 1972-02-14

Country Status (1)

Country Link
JP (1) JPS5234215B2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53116902A (en) * 1977-03-22 1978-10-12 Michiya Kk Method of engraving one direction expanding or shortening of printing plate and device therefor
JPS5938748A (ja) * 1982-08-28 1984-03-02 Dainippon Printing Co Ltd 露光方法
JPH0448542U (enrdf_load_stackoverflow) * 1990-08-29 1992-04-24
WO2013164939A1 (ja) * 2012-05-01 2013-11-07 株式会社ニコン 基板処理装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53116902A (en) * 1977-03-22 1978-10-12 Michiya Kk Method of engraving one direction expanding or shortening of printing plate and device therefor
JPS5938748A (ja) * 1982-08-28 1984-03-02 Dainippon Printing Co Ltd 露光方法
JPH0448542U (enrdf_load_stackoverflow) * 1990-08-29 1992-04-24
WO2013164939A1 (ja) * 2012-05-01 2013-11-07 株式会社ニコン 基板処理装置
JPWO2013164939A1 (ja) * 2012-05-01 2015-12-24 株式会社ニコン 基板処理装置

Also Published As

Publication number Publication date
JPS5234215B2 (enrdf_load_stackoverflow) 1977-09-02

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