JPS4885140A - - Google Patents

Info

Publication number
JPS4885140A
JPS4885140A JP47014855A JP1485572A JPS4885140A JP S4885140 A JPS4885140 A JP S4885140A JP 47014855 A JP47014855 A JP 47014855A JP 1485572 A JP1485572 A JP 1485572A JP S4885140 A JPS4885140 A JP S4885140A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47014855A
Other languages
Japanese (ja)
Other versions
JPS5234215B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47014855A priority Critical patent/JPS5234215B2/ja
Publication of JPS4885140A publication Critical patent/JPS4885140A/ja
Publication of JPS5234215B2 publication Critical patent/JPS5234215B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP47014855A 1972-02-14 1972-02-14 Expired JPS5234215B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47014855A JPS5234215B2 (en) 1972-02-14 1972-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47014855A JPS5234215B2 (en) 1972-02-14 1972-02-14

Publications (2)

Publication Number Publication Date
JPS4885140A true JPS4885140A (en) 1973-11-12
JPS5234215B2 JPS5234215B2 (en) 1977-09-02

Family

ID=11872632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47014855A Expired JPS5234215B2 (en) 1972-02-14 1972-02-14

Country Status (1)

Country Link
JP (1) JPS5234215B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53116902A (en) * 1977-03-22 1978-10-12 Michiya Kk Method of engraving one direction expanding or shortening of printing plate and device therefor
JPS5938748A (en) * 1982-08-28 1984-03-02 Dainippon Printing Co Ltd Exposure method
JPH0448542U (en) * 1990-08-29 1992-04-24
WO2013164939A1 (en) * 2012-05-01 2013-11-07 株式会社ニコン Substrate processing device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53116902A (en) * 1977-03-22 1978-10-12 Michiya Kk Method of engraving one direction expanding or shortening of printing plate and device therefor
JPS571825B2 (en) * 1977-03-22 1982-01-13
JPS5938748A (en) * 1982-08-28 1984-03-02 Dainippon Printing Co Ltd Exposure method
JPH0448542U (en) * 1990-08-29 1992-04-24
WO2013164939A1 (en) * 2012-05-01 2013-11-07 株式会社ニコン Substrate processing device
JPWO2013164939A1 (en) * 2012-05-01 2015-12-24 株式会社ニコン Substrate processing equipment

Also Published As

Publication number Publication date
JPS5234215B2 (en) 1977-09-02

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