JPS4885076A - - Google Patents

Info

Publication number
JPS4885076A
JPS4885076A JP1534372A JP1534372A JPS4885076A JP S4885076 A JPS4885076 A JP S4885076A JP 1534372 A JP1534372 A JP 1534372A JP 1534372 A JP1534372 A JP 1534372A JP S4885076 A JPS4885076 A JP S4885076A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1534372A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1534372A priority Critical patent/JPS4885076A/ja
Publication of JPS4885076A publication Critical patent/JPS4885076A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1534372A 1972-02-14 1972-02-14 Pending JPS4885076A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1534372A JPS4885076A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-02-14 1972-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1534372A JPS4885076A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-02-14 1972-02-14

Publications (1)

Publication Number Publication Date
JPS4885076A true JPS4885076A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-12

Family

ID=11886131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1534372A Pending JPS4885076A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-02-14 1972-02-14

Country Status (1)

Country Link
JP (1) JPS4885076A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01209737A (ja) * 1988-02-17 1989-08-23 Teru Kyushu Kk 基板処理装置及び基板処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01209737A (ja) * 1988-02-17 1989-08-23 Teru Kyushu Kk 基板処理装置及び基板処理方法

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