JPS4884089A - - Google Patents
Info
- Publication number
- JPS4884089A JPS4884089A JP1479272A JP1479272A JPS4884089A JP S4884089 A JPS4884089 A JP S4884089A JP 1479272 A JP1479272 A JP 1479272A JP 1479272 A JP1479272 A JP 1479272A JP S4884089 A JPS4884089 A JP S4884089A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1479272A JPS5214712B2 (en:Method) | 1972-02-14 | 1972-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1479272A JPS5214712B2 (en:Method) | 1972-02-14 | 1972-02-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4884089A true JPS4884089A (en:Method) | 1973-11-08 |
| JPS5214712B2 JPS5214712B2 (en:Method) | 1977-04-23 |
Family
ID=11870891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1479272A Expired JPS5214712B2 (en:Method) | 1972-02-14 | 1972-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5214712B2 (en:Method) |
-
1972
- 1972-02-14 JP JP1479272A patent/JPS5214712B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5214712B2 (en:Method) | 1977-04-23 |