JPS4882783A - - Google Patents
Info
- Publication number
- JPS4882783A JPS4882783A JP1318672A JP1318672A JPS4882783A JP S4882783 A JPS4882783 A JP S4882783A JP 1318672 A JP1318672 A JP 1318672A JP 1318672 A JP1318672 A JP 1318672A JP S4882783 A JPS4882783 A JP S4882783A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1318672A JPS4882783A (de) | 1972-02-04 | 1972-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1318672A JPS4882783A (de) | 1972-02-04 | 1972-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4882783A true JPS4882783A (de) | 1973-11-05 |
Family
ID=11826134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1318672A Pending JPS4882783A (de) | 1972-02-04 | 1972-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4882783A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01185930A (ja) * | 1988-01-21 | 1989-07-25 | Nec Corp | 半導体集積回路の製造方法 |
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1972
- 1972-02-04 JP JP1318672A patent/JPS4882783A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01185930A (ja) * | 1988-01-21 | 1989-07-25 | Nec Corp | 半導体集積回路の製造方法 |