JPS4881474A - - Google Patents
Info
- Publication number
- JPS4881474A JPS4881474A JP782972A JP782972A JPS4881474A JP S4881474 A JPS4881474 A JP S4881474A JP 782972 A JP782972 A JP 782972A JP 782972 A JP782972 A JP 782972A JP S4881474 A JPS4881474 A JP S4881474A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP782972A JPS4881474A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-01-19 | 1972-01-19 | |
US05/322,522 US3933538A (en) | 1972-01-18 | 1973-01-10 | Method and apparatus for production of liquid phase epitaxial layers of semiconductors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP782972A JPS4881474A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-01-19 | 1972-01-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4881474A true JPS4881474A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-10-31 |
Family
ID=11676471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP782972A Pending JPS4881474A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-01-18 | 1972-01-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4881474A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63209122A (ja) * | 1987-02-21 | 1988-08-30 | サムサン エレクトロニクス シーオー.,エルティーディー. | 液相薄膜結晶成長方法及び装置 |
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1972
- 1972-01-19 JP JP782972A patent/JPS4881474A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63209122A (ja) * | 1987-02-21 | 1988-08-30 | サムサン エレクトロニクス シーオー.,エルティーディー. | 液相薄膜結晶成長方法及び装置 |