JPS4880274A - - Google Patents
Info
- Publication number
- JPS4880274A JPS4880274A JP1058172A JP1058172A JPS4880274A JP S4880274 A JPS4880274 A JP S4880274A JP 1058172 A JP1058172 A JP 1058172A JP 1058172 A JP1058172 A JP 1058172A JP S4880274 A JPS4880274 A JP S4880274A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1058172A JPS4880274A (en:Method) | 1972-01-31 | 1972-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1058172A JPS4880274A (en:Method) | 1972-01-31 | 1972-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4880274A true JPS4880274A (en:Method) | 1973-10-27 |
Family
ID=11754196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1058172A Pending JPS4880274A (en:Method) | 1972-01-31 | 1972-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4880274A (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS583222A (ja) * | 1981-06-29 | 1983-01-10 | Fujitsu Ltd | イオンビ−ム堆積法 |
| JPS5897825A (ja) * | 1981-12-07 | 1983-06-10 | Seiko Epson Corp | イオン．ビ−ム．デポジシヨン法 |
-
1972
- 1972-01-31 JP JP1058172A patent/JPS4880274A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS583222A (ja) * | 1981-06-29 | 1983-01-10 | Fujitsu Ltd | イオンビ−ム堆積法 |
| JPS5897825A (ja) * | 1981-12-07 | 1983-06-10 | Seiko Epson Corp | イオン．ビ−ム．デポジシヨン法 |