JPS4878035A - - Google Patents

Info

Publication number
JPS4878035A
JPS4878035A JP805472A JP805472A JPS4878035A JP S4878035 A JPS4878035 A JP S4878035A JP 805472 A JP805472 A JP 805472A JP 805472 A JP805472 A JP 805472A JP S4878035 A JPS4878035 A JP S4878035A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP805472A
Other languages
Japanese (ja)
Other versions
JPS5436128B2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP805472A priority Critical patent/JPS5436128B2/ja
Publication of JPS4878035A publication Critical patent/JPS4878035A/ja
Publication of JPS5436128B2 publication Critical patent/JPS5436128B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP805472A 1972-01-22 1972-01-22 Expired JPS5436128B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP805472A JPS5436128B2 (https=) 1972-01-22 1972-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP805472A JPS5436128B2 (https=) 1972-01-22 1972-01-22

Publications (2)

Publication Number Publication Date
JPS4878035A true JPS4878035A (https=) 1973-10-19
JPS5436128B2 JPS5436128B2 (https=) 1979-11-07

Family

ID=11682604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP805472A Expired JPS5436128B2 (https=) 1972-01-22 1972-01-22

Country Status (1)

Country Link
JP (1) JPS5436128B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5985670U (ja) * 1982-12-01 1984-06-09 近藤 権士 基板保持爪の洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5985670U (ja) * 1982-12-01 1984-06-09 近藤 権士 基板保持爪の洗浄装置

Also Published As

Publication number Publication date
JPS5436128B2 (https=) 1979-11-07

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