JPS4878035A - - Google Patents

Info

Publication number
JPS4878035A
JPS4878035A JP805472A JP805472A JPS4878035A JP S4878035 A JPS4878035 A JP S4878035A JP 805472 A JP805472 A JP 805472A JP 805472 A JP805472 A JP 805472A JP S4878035 A JPS4878035 A JP S4878035A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP805472A
Other languages
Japanese (ja)
Other versions
JPS5436128B2 (en。
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP805472A priority Critical patent/JPS5436128B2/ja
Publication of JPS4878035A publication Critical patent/JPS4878035A/ja
Publication of JPS5436128B2 publication Critical patent/JPS5436128B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP805472A 1972-01-22 1972-01-22 Expired JPS5436128B2 (en。)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP805472A JPS5436128B2 (en。) 1972-01-22 1972-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP805472A JPS5436128B2 (en。) 1972-01-22 1972-01-22

Publications (2)

Publication Number Publication Date
JPS4878035A true JPS4878035A (en。) 1973-10-19
JPS5436128B2 JPS5436128B2 (en。) 1979-11-07

Family

ID=11682604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP805472A Expired JPS5436128B2 (en。) 1972-01-22 1972-01-22

Country Status (1)

Country Link
JP (1) JPS5436128B2 (en。)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5985670U (ja) * 1982-12-01 1984-06-09 近藤 権士 基板保持爪の洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5985670U (ja) * 1982-12-01 1984-06-09 近藤 権士 基板保持爪の洗浄装置

Also Published As

Publication number Publication date
JPS5436128B2 (en。) 1979-11-07

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