JPS4877891A - - Google Patents
Info
- Publication number
- JPS4877891A JPS4877891A JP47007613A JP761372A JPS4877891A JP S4877891 A JPS4877891 A JP S4877891A JP 47007613 A JP47007613 A JP 47007613A JP 761372 A JP761372 A JP 761372A JP S4877891 A JPS4877891 A JP S4877891A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47007613A JPS5247712B2 (ja) | 1972-01-21 | 1972-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47007613A JPS5247712B2 (ja) | 1972-01-21 | 1972-01-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4877891A true JPS4877891A (ja) | 1973-10-19 |
| JPS5247712B2 JPS5247712B2 (ja) | 1977-12-05 |
Family
ID=11670649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47007613A Expired JPS5247712B2 (ja) | 1972-01-21 | 1972-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5247712B2 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884692A (ja) * | 1972-02-10 | 1973-11-10 | ||
| JPS51144291A (en) * | 1975-06-06 | 1976-12-11 | Ulvac Corp | Ionic mass spectrometer |
| JPS63223549A (ja) * | 1987-03-13 | 1988-09-19 | Nec Corp | 窒化アルミニウム膜中の窒素の分析方法 |
-
1972
- 1972-01-21 JP JP47007613A patent/JPS5247712B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884692A (ja) * | 1972-02-10 | 1973-11-10 | ||
| JPS51144291A (en) * | 1975-06-06 | 1976-12-11 | Ulvac Corp | Ionic mass spectrometer |
| JPS5831700B2 (ja) * | 1975-06-06 | 1983-07-07 | ニホンシンクウギジユツ カブシキガイシヤ | イオンシツリヨウブンセキソウチ |
| JPS63223549A (ja) * | 1987-03-13 | 1988-09-19 | Nec Corp | 窒化アルミニウム膜中の窒素の分析方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5247712B2 (ja) | 1977-12-05 |