JPS4873076A - - Google Patents
Info
- Publication number
- JPS4873076A JPS4873076A JP47000089A JP8972A JPS4873076A JP S4873076 A JPS4873076 A JP S4873076A JP 47000089 A JP47000089 A JP 47000089A JP 8972 A JP8972 A JP 8972A JP S4873076 A JPS4873076 A JP S4873076A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7289A JPS5225074B2 (https=) | 1971-12-29 | 1971-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7289A JPS5225074B2 (https=) | 1971-12-29 | 1971-12-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4873076A true JPS4873076A (https=) | 1973-10-02 |
| JPS5225074B2 JPS5225074B2 (https=) | 1977-07-05 |
Family
ID=11464386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7289A Expired JPS5225074B2 (https=) | 1971-12-29 | 1971-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5225074B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0228278U (https=) * | 1988-08-12 | 1990-02-23 |
-
1971
- 1971-12-29 JP JP7289A patent/JPS5225074B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5225074B2 (https=) | 1977-07-05 |