JPS4873076A - - Google Patents

Info

Publication number
JPS4873076A
JPS4873076A JP47000089A JP8972A JPS4873076A JP S4873076 A JPS4873076 A JP S4873076A JP 47000089 A JP47000089 A JP 47000089A JP 8972 A JP8972 A JP 8972A JP S4873076 A JPS4873076 A JP S4873076A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47000089A
Other languages
Japanese (ja)
Other versions
JPS5225074B2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7289A priority Critical patent/JPS5225074B2/ja
Publication of JPS4873076A publication Critical patent/JPS4873076A/ja
Publication of JPS5225074B2 publication Critical patent/JPS5225074B2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00269—Bonding of solid lids or wafers to the substrate

Landscapes

  • Die Bonding (AREA)
JP7289A 1971-12-29 1971-12-29 Expired JPS5225074B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7289A JPS5225074B2 (cg-RX-API-DMAC7.html) 1971-12-29 1971-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7289A JPS5225074B2 (cg-RX-API-DMAC7.html) 1971-12-29 1971-12-29

Publications (2)

Publication Number Publication Date
JPS4873076A true JPS4873076A (cg-RX-API-DMAC7.html) 1973-10-02
JPS5225074B2 JPS5225074B2 (cg-RX-API-DMAC7.html) 1977-07-05

Family

ID=11464386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7289A Expired JPS5225074B2 (cg-RX-API-DMAC7.html) 1971-12-29 1971-12-29

Country Status (1)

Country Link
JP (1) JPS5225074B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0228278U (cg-RX-API-DMAC7.html) * 1988-08-12 1990-02-23

Also Published As

Publication number Publication date
JPS5225074B2 (cg-RX-API-DMAC7.html) 1977-07-05

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