JPS4871980A - - Google Patents
Info
- Publication number
- JPS4871980A JPS4871980A JP128972A JP128972A JPS4871980A JP S4871980 A JPS4871980 A JP S4871980A JP 128972 A JP128972 A JP 128972A JP 128972 A JP128972 A JP 128972A JP S4871980 A JPS4871980 A JP S4871980A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Pressure Sensors (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP128972A JPS5313957B2 (en:Method) | 1971-12-28 | 1971-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP128972A JPS5313957B2 (en:Method) | 1971-12-28 | 1971-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4871980A true JPS4871980A (en:Method) | 1973-09-28 |
| JPS5313957B2 JPS5313957B2 (en:Method) | 1978-05-13 |
Family
ID=11497281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP128972A Expired JPS5313957B2 (en:Method) | 1971-12-28 | 1971-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5313957B2 (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5273683A (en) * | 1975-12-16 | 1977-06-20 | Matsushita Electric Ind Co Ltd | Semiconductor thin film pressure transducer |
| JPS5273684A (en) * | 1975-12-16 | 1977-06-20 | Matsushita Electric Ind Co Ltd | Semiconductor thin film pressure resistive element |
| JPS5274291A (en) * | 1975-12-17 | 1977-06-22 | Matsushita Electric Ind Co Ltd | Production of pressure transducer |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6441008U (en:Method) * | 1987-05-11 | 1989-03-10 |
-
1971
- 1971-12-28 JP JP128972A patent/JPS5313957B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5273683A (en) * | 1975-12-16 | 1977-06-20 | Matsushita Electric Ind Co Ltd | Semiconductor thin film pressure transducer |
| JPS5273684A (en) * | 1975-12-16 | 1977-06-20 | Matsushita Electric Ind Co Ltd | Semiconductor thin film pressure resistive element |
| JPS5274291A (en) * | 1975-12-17 | 1977-06-22 | Matsushita Electric Ind Co Ltd | Production of pressure transducer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5313957B2 (en:Method) | 1978-05-13 |