JPS4871980A - - Google Patents

Info

Publication number
JPS4871980A
JPS4871980A JP128972A JP128972A JPS4871980A JP S4871980 A JPS4871980 A JP S4871980A JP 128972 A JP128972 A JP 128972A JP 128972 A JP128972 A JP 128972A JP S4871980 A JPS4871980 A JP S4871980A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP128972A
Other languages
Japanese (ja)
Other versions
JPS5313957B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP128972A priority Critical patent/JPS5313957B2/ja
Publication of JPS4871980A publication Critical patent/JPS4871980A/ja
Publication of JPS5313957B2 publication Critical patent/JPS5313957B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
JP128972A 1971-12-28 1971-12-28 Expired JPS5313957B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP128972A JPS5313957B2 (enrdf_load_stackoverflow) 1971-12-28 1971-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP128972A JPS5313957B2 (enrdf_load_stackoverflow) 1971-12-28 1971-12-28

Publications (2)

Publication Number Publication Date
JPS4871980A true JPS4871980A (enrdf_load_stackoverflow) 1973-09-28
JPS5313957B2 JPS5313957B2 (enrdf_load_stackoverflow) 1978-05-13

Family

ID=11497281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP128972A Expired JPS5313957B2 (enrdf_load_stackoverflow) 1971-12-28 1971-12-28

Country Status (1)

Country Link
JP (1) JPS5313957B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5273683A (en) * 1975-12-16 1977-06-20 Matsushita Electric Ind Co Ltd Semiconductor thin film pressure transducer
JPS5273684A (en) * 1975-12-16 1977-06-20 Matsushita Electric Ind Co Ltd Semiconductor thin film pressure resistive element
JPS5274291A (en) * 1975-12-17 1977-06-22 Matsushita Electric Ind Co Ltd Production of pressure transducer

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6441008U (enrdf_load_stackoverflow) * 1987-05-11 1989-03-10

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5273683A (en) * 1975-12-16 1977-06-20 Matsushita Electric Ind Co Ltd Semiconductor thin film pressure transducer
JPS5273684A (en) * 1975-12-16 1977-06-20 Matsushita Electric Ind Co Ltd Semiconductor thin film pressure resistive element
JPS5274291A (en) * 1975-12-17 1977-06-22 Matsushita Electric Ind Co Ltd Production of pressure transducer

Also Published As

Publication number Publication date
JPS5313957B2 (enrdf_load_stackoverflow) 1978-05-13

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