JPS4870481A - - Google Patents

Info

Publication number
JPS4870481A
JPS4870481A JP47000516A JP51672A JPS4870481A JP S4870481 A JPS4870481 A JP S4870481A JP 47000516 A JP47000516 A JP 47000516A JP 51672 A JP51672 A JP 51672A JP S4870481 A JPS4870481 A JP S4870481A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47000516A
Other languages
Japanese (ja)
Other versions
JPS529349B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47000516A priority Critical patent/JPS529349B2/ja
Publication of JPS4870481A publication Critical patent/JPS4870481A/ja
Publication of JPS529349B2 publication Critical patent/JPS529349B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Bipolar Transistors (AREA)
JP47000516A 1971-12-23 1971-12-23 Expired JPS529349B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47000516A JPS529349B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-12-23 1971-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47000516A JPS529349B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-12-23 1971-12-23

Publications (2)

Publication Number Publication Date
JPS4870481A true JPS4870481A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-09-25
JPS529349B2 JPS529349B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-03-15

Family

ID=11475922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47000516A Expired JPS529349B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-12-23 1971-12-23

Country Status (1)

Country Link
JP (1) JPS529349B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59227128A (ja) * 1983-06-08 1984-12-20 Hitachi Ltd 半導体基体の酸化法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59227128A (ja) * 1983-06-08 1984-12-20 Hitachi Ltd 半導体基体の酸化法

Also Published As

Publication number Publication date
JPS529349B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-03-15

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