JPS4868169A - - Google Patents
Info
- Publication number
- JPS4868169A JPS4868169A JP46103355A JP10335571A JPS4868169A JP S4868169 A JPS4868169 A JP S4868169A JP 46103355 A JP46103355 A JP 46103355A JP 10335571 A JP10335571 A JP 10335571A JP S4868169 A JPS4868169 A JP S4868169A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46103355A JPS5123426B2 (en:Method) | 1971-12-20 | 1971-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46103355A JPS5123426B2 (en:Method) | 1971-12-20 | 1971-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4868169A true JPS4868169A (en:Method) | 1973-09-17 |
| JPS5123426B2 JPS5123426B2 (en:Method) | 1976-07-16 |
Family
ID=14351810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46103355A Expired JPS5123426B2 (en:Method) | 1971-12-20 | 1971-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5123426B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62159418A (ja) * | 1986-01-07 | 1987-07-15 | Fujitsu Ltd | 気相成長装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5540540U (en:Method) * | 1978-09-05 | 1980-03-15 |
-
1971
- 1971-12-20 JP JP46103355A patent/JPS5123426B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62159418A (ja) * | 1986-01-07 | 1987-07-15 | Fujitsu Ltd | 気相成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5123426B2 (en:Method) | 1976-07-16 |