JPS4868169A - - Google Patents

Info

Publication number
JPS4868169A
JPS4868169A JP46103355A JP10335571A JPS4868169A JP S4868169 A JPS4868169 A JP S4868169A JP 46103355 A JP46103355 A JP 46103355A JP 10335571 A JP10335571 A JP 10335571A JP S4868169 A JPS4868169 A JP S4868169A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP46103355A
Other languages
Japanese (ja)
Other versions
JPS5123426B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46103355A priority Critical patent/JPS5123426B2/ja
Publication of JPS4868169A publication Critical patent/JPS4868169A/ja
Publication of JPS5123426B2 publication Critical patent/JPS5123426B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP46103355A 1971-12-20 1971-12-20 Expired JPS5123426B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP46103355A JPS5123426B2 (enrdf_load_stackoverflow) 1971-12-20 1971-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46103355A JPS5123426B2 (enrdf_load_stackoverflow) 1971-12-20 1971-12-20

Publications (2)

Publication Number Publication Date
JPS4868169A true JPS4868169A (enrdf_load_stackoverflow) 1973-09-17
JPS5123426B2 JPS5123426B2 (enrdf_load_stackoverflow) 1976-07-16

Family

ID=14351810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46103355A Expired JPS5123426B2 (enrdf_load_stackoverflow) 1971-12-20 1971-12-20

Country Status (1)

Country Link
JP (1) JPS5123426B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62159418A (ja) * 1986-01-07 1987-07-15 Fujitsu Ltd 気相成長装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540540U (enrdf_load_stackoverflow) * 1978-09-05 1980-03-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62159418A (ja) * 1986-01-07 1987-07-15 Fujitsu Ltd 気相成長装置

Also Published As

Publication number Publication date
JPS5123426B2 (enrdf_load_stackoverflow) 1976-07-16

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