JPS4865873A - - Google Patents

Info

Publication number
JPS4865873A
JPS4865873A JP10052371A JP10052371A JPS4865873A JP S4865873 A JPS4865873 A JP S4865873A JP 10052371 A JP10052371 A JP 10052371A JP 10052371 A JP10052371 A JP 10052371A JP S4865873 A JPS4865873 A JP S4865873A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10052371A
Other languages
Japanese (ja)
Other versions
JPS5137144B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46100523A priority Critical patent/JPS5137144B2/ja
Priority to NL7213557A priority patent/NL7213557A/xx
Priority to DE2249144A priority patent/DE2249144C3/de
Priority to CA153,457A priority patent/CA967080A/en
Priority to US295554A priority patent/US3896765A/en
Publication of JPS4865873A publication Critical patent/JPS4865873A/ja
Publication of JPS5137144B2 publication Critical patent/JPS5137144B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP46100523A 1971-10-06 1971-12-10 Expired JPS5137144B2 (enExample)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP46100523A JPS5137144B2 (enExample) 1971-12-10 1971-12-10
NL7213557A NL7213557A (enExample) 1971-10-06 1972-10-06
DE2249144A DE2249144C3 (de) 1971-10-06 1972-10-06 11.09.72 Japan 47-91536 Vorrichtung zum epitaktischen Aufwachsen einer Halbleiterschicht auf ein Substrat
CA153,457A CA967080A (en) 1971-10-06 1972-10-06 Method and apparatus for liquid-phase epitaxial growth
US295554A US3896765A (en) 1971-10-06 1972-10-06 Apparatus for liquid-phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46100523A JPS5137144B2 (enExample) 1971-12-10 1971-12-10

Publications (2)

Publication Number Publication Date
JPS4865873A true JPS4865873A (enExample) 1973-09-10
JPS5137144B2 JPS5137144B2 (enExample) 1976-10-14

Family

ID=14276302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46100523A Expired JPS5137144B2 (enExample) 1971-10-06 1971-12-10

Country Status (1)

Country Link
JP (1) JPS5137144B2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50350A (enExample) * 1973-05-07 1975-01-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50350A (enExample) * 1973-05-07 1975-01-06

Also Published As

Publication number Publication date
JPS5137144B2 (enExample) 1976-10-14

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