JPS4865873A - - Google Patents
Info
- Publication number
- JPS4865873A JPS4865873A JP46100523A JP10052371A JPS4865873A JP S4865873 A JPS4865873 A JP S4865873A JP 46100523 A JP46100523 A JP 46100523A JP 10052371 A JP10052371 A JP 10052371A JP S4865873 A JPS4865873 A JP S4865873A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46100523A JPS5137144B2 (cg-RX-API-DMAC7.html) | 1971-12-10 | 1971-12-10 | |
| DE2249144A DE2249144C3 (de) | 1971-10-06 | 1972-10-06 | 11.09.72 Japan 47-91536 Vorrichtung zum epitaktischen Aufwachsen einer Halbleiterschicht auf ein Substrat |
| NL7213557A NL7213557A (cg-RX-API-DMAC7.html) | 1971-10-06 | 1972-10-06 | |
| CA153,457A CA967080A (en) | 1971-10-06 | 1972-10-06 | Method and apparatus for liquid-phase epitaxial growth |
| US295554A US3896765A (en) | 1971-10-06 | 1972-10-06 | Apparatus for liquid-phase epitaxial growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46100523A JPS5137144B2 (cg-RX-API-DMAC7.html) | 1971-12-10 | 1971-12-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4865873A true JPS4865873A (cg-RX-API-DMAC7.html) | 1973-09-10 |
| JPS5137144B2 JPS5137144B2 (cg-RX-API-DMAC7.html) | 1976-10-14 |
Family
ID=14276302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46100523A Expired JPS5137144B2 (cg-RX-API-DMAC7.html) | 1971-10-06 | 1971-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5137144B2 (cg-RX-API-DMAC7.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50350A (cg-RX-API-DMAC7.html) * | 1973-05-07 | 1975-01-06 |
-
1971
- 1971-12-10 JP JP46100523A patent/JPS5137144B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50350A (cg-RX-API-DMAC7.html) * | 1973-05-07 | 1975-01-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5137144B2 (cg-RX-API-DMAC7.html) | 1976-10-14 |