JPS4864942A - - Google Patents

Info

Publication number
JPS4864942A
JPS4864942A JP47121105A JP12110572A JPS4864942A JP S4864942 A JPS4864942 A JP S4864942A JP 47121105 A JP47121105 A JP 47121105A JP 12110572 A JP12110572 A JP 12110572A JP S4864942 A JPS4864942 A JP S4864942A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47121105A
Other languages
Japanese (ja)
Other versions
JPS5413789B2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4864942A publication Critical patent/JPS4864942A/ja
Publication of JPS5413789B2 publication Critical patent/JPS5413789B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0215Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02015Interferometers characterised by the beam path configuration
    • G01B9/02024Measuring in transmission, i.e. light traverses the object

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP12110572A 1971-12-03 1972-12-02 Expired JPS5413789B2 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7143511A FR2163862A5 (https=) 1971-12-03 1971-12-03

Publications (2)

Publication Number Publication Date
JPS4864942A true JPS4864942A (https=) 1973-09-07
JPS5413789B2 JPS5413789B2 (https=) 1979-06-02

Family

ID=9086904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12110572A Expired JPS5413789B2 (https=) 1971-12-03 1972-12-02

Country Status (4)

Country Link
US (1) US3825349A (https=)
JP (1) JPS5413789B2 (https=)
DE (1) DE2259262B2 (https=)
FR (1) FR2163862A5 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3958884A (en) * 1974-04-24 1976-05-25 Vickers Limited Interferometric apparatus
US5210591A (en) * 1991-08-02 1993-05-11 Hughes Aircraft Company Interferometric ball bearing test station
KR100453710B1 (ko) * 2002-02-09 2004-10-20 국방과학연구소 표면 측정장치 및 그 측정방법
DE10331501B4 (de) * 2003-07-11 2005-06-30 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Justierung eines Mikroskops
KR100768038B1 (ko) * 2006-10-24 2007-10-17 한국전기연구원 균일한 내부 전반사 조명에 의한 바이오칩 측정 장치 및방법

Also Published As

Publication number Publication date
FR2163862A5 (https=) 1973-07-27
US3825349A (en) 1974-07-23
JPS5413789B2 (https=) 1979-06-02
DE2259262A1 (de) 1973-06-20
DE2259262B2 (de) 1977-05-05

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