JPS4849155A - - Google Patents
Info
- Publication number
- JPS4849155A JPS4849155A JP8326271A JP8326271A JPS4849155A JP S4849155 A JPS4849155 A JP S4849155A JP 8326271 A JP8326271 A JP 8326271A JP 8326271 A JP8326271 A JP 8326271A JP S4849155 A JPS4849155 A JP S4849155A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Conveyors (AREA)
- Attitude Control For Articles On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8326271A JPS533537B2 (en) | 1971-10-22 | 1971-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8326271A JPS533537B2 (en) | 1971-10-22 | 1971-10-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4849155A true JPS4849155A (en) | 1973-07-11 |
| JPS533537B2 JPS533537B2 (en) | 1978-02-07 |
Family
ID=13797421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8326271A Expired JPS533537B2 (en) | 1971-10-22 | 1971-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS533537B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6247368B1 (en) | 1999-01-04 | 2001-06-19 | International Business Machines Corporation | CMP wet application wafer sensor |
-
1971
- 1971-10-22 JP JP8326271A patent/JPS533537B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6247368B1 (en) | 1999-01-04 | 2001-06-19 | International Business Machines Corporation | CMP wet application wafer sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS533537B2 (en) | 1978-02-07 |