JPS4846574A - - Google Patents
Info
- Publication number
- JPS4846574A JPS4846574A JP8269971A JP8269971A JPS4846574A JP S4846574 A JPS4846574 A JP S4846574A JP 8269971 A JP8269971 A JP 8269971A JP 8269971 A JP8269971 A JP 8269971A JP S4846574 A JPS4846574 A JP S4846574A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8269971A JPS5221471B2 (en) | 1971-10-18 | 1971-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8269971A JPS5221471B2 (en) | 1971-10-18 | 1971-10-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4846574A true JPS4846574A (en) | 1973-07-03 |
| JPS5221471B2 JPS5221471B2 (en) | 1977-06-10 |
Family
ID=13781642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8269971A Expired JPS5221471B2 (en) | 1971-10-18 | 1971-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5221471B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5112389A (en) * | 1974-07-20 | 1976-01-30 | Kagaku Gijutsucho Mukizai | FUJUTAIIKITANKETSUSHOIKUSEIHONIOKERU KETSUSHOKEIJIDOSEIGYOSOCHI |
| JPS5117187A (en) * | 1974-08-02 | 1976-02-10 | Sumitomo Electric Industries | |
| JPS632888A (en) * | 1986-06-23 | 1988-01-07 | Mitsubishi Metal Corp | Group management system for single crystal pulling-up device |
| JPH01313385A (en) * | 1988-06-09 | 1989-12-18 | Kokusai Electric Co Ltd | Method for controlling diameter of semiconductor single crystal |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS586525B2 (en) * | 1977-06-17 | 1983-02-04 | 月島機械株式会社 | Single filter press stock solution supply device |
| JPS6143528Y2 (en) * | 1980-10-29 | 1986-12-09 |
-
1971
- 1971-10-18 JP JP8269971A patent/JPS5221471B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5112389A (en) * | 1974-07-20 | 1976-01-30 | Kagaku Gijutsucho Mukizai | FUJUTAIIKITANKETSUSHOIKUSEIHONIOKERU KETSUSHOKEIJIDOSEIGYOSOCHI |
| JPS5117187A (en) * | 1974-08-02 | 1976-02-10 | Sumitomo Electric Industries | |
| JPS632888A (en) * | 1986-06-23 | 1988-01-07 | Mitsubishi Metal Corp | Group management system for single crystal pulling-up device |
| JPH0751476B2 (en) * | 1986-06-23 | 1995-06-05 | 三菱マテリアル株式会社 | Group control system for single crystal pulling equipment |
| JPH01313385A (en) * | 1988-06-09 | 1989-12-18 | Kokusai Electric Co Ltd | Method for controlling diameter of semiconductor single crystal |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5221471B2 (en) | 1977-06-10 |