JPS4843472B1 - - Google Patents
Info
- Publication number
- JPS4843472B1 JPS4843472B1 JP3110168A JP3110168A JPS4843472B1 JP S4843472 B1 JPS4843472 B1 JP S4843472B1 JP 3110168 A JP3110168 A JP 3110168A JP 3110168 A JP3110168 A JP 3110168A JP S4843472 B1 JPS4843472 B1 JP S4843472B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3110168A JPS4843472B1 (en) | 1968-05-09 | 1968-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3110168A JPS4843472B1 (en) | 1968-05-09 | 1968-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4843472B1 true JPS4843472B1 (en) | 1973-12-19 |
Family
ID=12321993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3110168A Pending JPS4843472B1 (en) | 1968-05-09 | 1968-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4843472B1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014532304A (en) * | 2011-09-23 | 2014-12-04 | ノベラス・システムズ・インコーポレーテッドＮｏｖｅｌｌｕｓ Ｓｙｓｔｅｍｓ Ｉｎｃｏｒｐｏｒａｔｅｄ | Plasma activated conformal dielectric films |
-
1968
- 1968-05-09 JP JP3110168A patent/JPS4843472B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014532304A (en) * | 2011-09-23 | 2014-12-04 | ノベラス・システムズ・インコーポレーテッドＮｏｖｅｌｌｕｓ Ｓｙｓｔｅｍｓ Ｉｎｃｏｒｐｏｒａｔｅｄ | Plasma activated conformal dielectric films |