JPS4843262A - - Google Patents

Info

Publication number
JPS4843262A
JPS4843262A JP47097606A JP9760672A JPS4843262A JP S4843262 A JPS4843262 A JP S4843262A JP 47097606 A JP47097606 A JP 47097606A JP 9760672 A JP9760672 A JP 9760672A JP S4843262 A JPS4843262 A JP S4843262A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47097606A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4843262A publication Critical patent/JPS4843262A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/07—Programme control other than numerical control, i.e. in sequence controllers or logic controllers where the programme is defined in the fixed connection of electrical elements, e.g. potentiometers, counters, transistors
    • G05B19/075—Programme control other than numerical control, i.e. in sequence controllers or logic controllers where the programme is defined in the fixed connection of electrical elements, e.g. potentiometers, counters, transistors for delivering a step function, a slope or a continuous function
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Electron Sources, Ion Sources (AREA)
JP47097606A 1971-09-28 1972-09-28 Pending JPS4843262A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2149107A DE2149107C3 (en) 1971-09-28 1971-09-28 Control and regulating device for the current fed into the electromagnetic coils of corpuscular beam devices

Publications (1)

Publication Number Publication Date
JPS4843262A true JPS4843262A (en) 1973-06-22

Family

ID=5821227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47097606A Pending JPS4843262A (en) 1971-09-28 1972-09-28

Country Status (5)

Country Link
US (1) US3757120A (en)
JP (1) JPS4843262A (en)
DE (1) DE2149107C3 (en)
GB (1) GB1406852A (en)
NL (1) NL7206851A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330865A (en) * 1976-09-03 1978-03-23 Hitachi Ltd Electron microscope provided with sample irradiating electron beam quantity measuring unit
DE2936911A1 (en) * 1979-09-12 1981-04-02 Siemens AG, 1000 Berlin und 8000 München METHOD AND DEVICE FOR REGULATING A MAGNETIC DEFLECTION SYSTEM
JPS57212754A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Electron-beam controller for electron microscope
EP0314947A1 (en) * 1987-11-03 1989-05-10 Siemens Aktiengesellschaft Circuit allowing the magnification independant image shifting
DE3803102A1 (en) * 1988-02-03 1989-08-17 Schoppe & Faeser Gmbh ANALOG VALUE STORAGE WITH A FORWARD REVERSE COUNTER AND A DIGITAL-ANALOG CONVERTER THEREOF

Also Published As

Publication number Publication date
DE2149107C3 (en) 1975-05-15
US3757120A (en) 1973-09-04
DE2149107A1 (en) 1973-04-05
NL7206851A (en) 1973-03-30
GB1406852A (en) 1975-09-17
DE2149107B2 (en) 1974-10-03

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