JPS4839171A - - Google Patents
Info
- Publication number
- JPS4839171A JPS4839171A JP7341471A JP7341471A JPS4839171A JP S4839171 A JPS4839171 A JP S4839171A JP 7341471 A JP7341471 A JP 7341471A JP 7341471 A JP7341471 A JP 7341471A JP S4839171 A JPS4839171 A JP S4839171A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7341471A JPS5117374B2 (https=) | 1971-09-22 | 1971-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7341471A JPS5117374B2 (https=) | 1971-09-22 | 1971-09-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4839171A true JPS4839171A (https=) | 1973-06-08 |
| JPS5117374B2 JPS5117374B2 (https=) | 1976-06-02 |
Family
ID=13517501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7341471A Expired JPS5117374B2 (https=) | 1971-09-22 | 1971-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5117374B2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911468A (https=) * | 1972-05-30 | 1974-01-31 | ||
| JPS50115976A (https=) * | 1974-02-25 | 1975-09-10 | ||
| JPS6126772A (ja) * | 1984-07-16 | 1986-02-06 | Canon Inc | 堆積膜形成方法 |
-
1971
- 1971-09-22 JP JP7341471A patent/JPS5117374B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911468A (https=) * | 1972-05-30 | 1974-01-31 | ||
| JPS50115976A (https=) * | 1974-02-25 | 1975-09-10 | ||
| JPS6126772A (ja) * | 1984-07-16 | 1986-02-06 | Canon Inc | 堆積膜形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5117374B2 (https=) | 1976-06-02 |