JPS4839163A - - Google Patents
Info
- Publication number
- JPS4839163A JPS4839163A JP46073408A JP7340871A JPS4839163A JP S4839163 A JPS4839163 A JP S4839163A JP 46073408 A JP46073408 A JP 46073408A JP 7340871 A JP7340871 A JP 7340871A JP S4839163 A JPS4839163 A JP S4839163A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46073408A JPS4839163A (enExample) | 1971-09-22 | 1971-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46073408A JPS4839163A (enExample) | 1971-09-22 | 1971-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4839163A true JPS4839163A (enExample) | 1973-06-08 |
Family
ID=13517324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46073408A Pending JPS4839163A (enExample) | 1971-09-22 | 1971-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4839163A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5034461A (enExample) * | 1973-07-31 | 1975-04-02 | ||
| JPS56134744U (enExample) * | 1981-01-22 | 1981-10-13 | ||
| JP2010118361A (ja) * | 2005-09-06 | 2010-05-27 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 放出パターンの放出領域を選択するための装置及び方法 |
-
1971
- 1971-09-22 JP JP46073408A patent/JPS4839163A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5034461A (enExample) * | 1973-07-31 | 1975-04-02 | ||
| JPS56134744U (enExample) * | 1981-01-22 | 1981-10-13 | ||
| JP2010118361A (ja) * | 2005-09-06 | 2010-05-27 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 放出パターンの放出領域を選択するための装置及び方法 |