JPS4838981A - - Google Patents
Info
- Publication number
- JPS4838981A JPS4838981A JP7244571A JP7244571A JPS4838981A JP S4838981 A JPS4838981 A JP S4838981A JP 7244571 A JP7244571 A JP 7244571A JP 7244571 A JP7244571 A JP 7244571A JP S4838981 A JPS4838981 A JP S4838981A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7244571A JPS5137148B2 (en:Method) | 1971-09-20 | 1971-09-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7244571A JPS5137148B2 (en:Method) | 1971-09-20 | 1971-09-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4838981A true JPS4838981A (en:Method) | 1973-06-08 |
JPS5137148B2 JPS5137148B2 (en:Method) | 1976-10-14 |
Family
ID=13489482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7244571A Expired JPS5137148B2 (en:Method) | 1971-09-20 | 1971-09-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5137148B2 (en:Method) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201450U (en:Method) * | 1986-06-12 | 1987-12-22 |
-
1971
- 1971-09-20 JP JP7244571A patent/JPS5137148B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201450U (en:Method) * | 1986-06-12 | 1987-12-22 |
Also Published As
Publication number | Publication date |
---|---|
JPS5137148B2 (en:Method) | 1976-10-14 |