JPS4838972A - - Google Patents

Info

Publication number
JPS4838972A
JPS4838972A JP9276272A JP9276272A JPS4838972A JP S4838972 A JPS4838972 A JP S4838972A JP 9276272 A JP9276272 A JP 9276272A JP 9276272 A JP9276272 A JP 9276272A JP S4838972 A JPS4838972 A JP S4838972A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9276272A
Other languages
Japanese (ja)
Other versions
JPS5138215B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712146071 external-priority patent/DE2146071C3/en
Application filed filed Critical
Publication of JPS4838972A publication Critical patent/JPS4838972A/ja
Publication of JPS5138215B2 publication Critical patent/JPS5138215B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/025—Compensating stray fields
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F7/00—Regulating magnetic variables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00—Screening of apparatus or components against electric or magnetic fields
    • H05K9/0064—Earth or grounding circuit

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measuring Magnetic Variables (AREA)
  • Electron Sources, Ion Sources (AREA)
JP9276272A 1971-09-15 1972-09-14 Expired JPS5138215B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712146071 DE2146071C3 (en) 1971-09-15 Arrangement for achieving a space free of magnetic interference fields

Publications (2)

Publication Number Publication Date
JPS4838972A true JPS4838972A (en) 1973-06-08
JPS5138215B2 JPS5138215B2 (en) 1976-10-20

Family

ID=5819613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9276272A Expired JPS5138215B2 (en) 1971-09-15 1972-09-14

Country Status (2)

Country Link
JP (1) JPS5138215B2 (en)
NL (1) NL7206464A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53112469U (en) * 1977-02-15 1978-09-07
JPS5729158A (en) * 1980-07-30 1982-02-17 Hitachi Ltd Retrying system for program
JPH0636741A (en) * 1992-07-10 1994-02-10 Shimadzu Corp Magnetic field type mass spectrometer
JP2001281311A (en) * 2000-03-28 2001-10-10 Mti:Kk Disturbance magnetic field canceling device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0482815U (en) * 1990-11-28 1992-07-20

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53112469U (en) * 1977-02-15 1978-09-07
JPS5729158A (en) * 1980-07-30 1982-02-17 Hitachi Ltd Retrying system for program
JPH0636741A (en) * 1992-07-10 1994-02-10 Shimadzu Corp Magnetic field type mass spectrometer
JP2001281311A (en) * 2000-03-28 2001-10-10 Mti:Kk Disturbance magnetic field canceling device

Also Published As

Publication number Publication date
DE2146071B2 (en) 1975-07-10
NL7206464A (en) 1973-03-19
JPS5138215B2 (en) 1976-10-20
DE2146071A1 (en) 1973-03-22

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