JPS4838690A - - Google Patents
Info
- Publication number
- JPS4838690A JPS4838690A JP7172371A JP7172371A JPS4838690A JP S4838690 A JPS4838690 A JP S4838690A JP 7172371 A JP7172371 A JP 7172371A JP 7172371 A JP7172371 A JP 7172371A JP S4838690 A JPS4838690 A JP S4838690A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7172371A JPS4838690A (en) | 1971-09-17 | 1971-09-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7172371A JPS4838690A (en) | 1971-09-17 | 1971-09-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4838690A true JPS4838690A (en) | 1973-06-07 |
Family
ID=13468712
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7172371A Pending JPS4838690A (en) | 1971-09-17 | 1971-09-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4838690A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52149665U (en) * | 1976-05-11 | 1977-11-12 | ||
JPH01105574A (en) * | 1987-10-19 | 1989-04-24 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH01232750A (en) * | 1988-03-12 | 1989-09-18 | Fujitsu Ltd | Manufacture of laminated soi substrate |
JPH0311217A (en) * | 1989-06-07 | 1991-01-18 | Kawasaki Steel Corp | Operation of plasma melting furnace |
JPH0435044A (en) * | 1990-05-31 | 1992-02-05 | Seiko Instr Inc | Manufacture of semiconductor substrate |
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1971
- 1971-09-17 JP JP7172371A patent/JPS4838690A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52149665U (en) * | 1976-05-11 | 1977-11-12 | ||
JPH01105574A (en) * | 1987-10-19 | 1989-04-24 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH01232750A (en) * | 1988-03-12 | 1989-09-18 | Fujitsu Ltd | Manufacture of laminated soi substrate |
JPH0311217A (en) * | 1989-06-07 | 1991-01-18 | Kawasaki Steel Corp | Operation of plasma melting furnace |
JPH0435044A (en) * | 1990-05-31 | 1992-02-05 | Seiko Instr Inc | Manufacture of semiconductor substrate |