JPS4838690A - - Google Patents

Info

Publication number
JPS4838690A
JPS4838690A JP7172371A JP7172371A JPS4838690A JP S4838690 A JPS4838690 A JP S4838690A JP 7172371 A JP7172371 A JP 7172371A JP 7172371 A JP7172371 A JP 7172371A JP S4838690 A JPS4838690 A JP S4838690A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7172371A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7172371A priority Critical patent/JPS4838690A/ja
Publication of JPS4838690A publication Critical patent/JPS4838690A/ja
Pending legal-status Critical Current

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  • Element Separation (AREA)
JP7172371A 1971-09-17 1971-09-17 Pending JPS4838690A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7172371A JPS4838690A (en) 1971-09-17 1971-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7172371A JPS4838690A (en) 1971-09-17 1971-09-17

Publications (1)

Publication Number Publication Date
JPS4838690A true JPS4838690A (en) 1973-06-07

Family

ID=13468712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7172371A Pending JPS4838690A (en) 1971-09-17 1971-09-17

Country Status (1)

Country Link
JP (1) JPS4838690A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52149665U (en) * 1976-05-11 1977-11-12
JPH01105574A (en) * 1987-10-19 1989-04-24 Fujitsu Ltd Manufacture of semiconductor device
JPH01232750A (en) * 1988-03-12 1989-09-18 Fujitsu Ltd Manufacture of laminated soi substrate
JPH0311217A (en) * 1989-06-07 1991-01-18 Kawasaki Steel Corp Operation of plasma melting furnace
JPH0435044A (en) * 1990-05-31 1992-02-05 Seiko Instr Inc Manufacture of semiconductor substrate

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52149665U (en) * 1976-05-11 1977-11-12
JPH01105574A (en) * 1987-10-19 1989-04-24 Fujitsu Ltd Manufacture of semiconductor device
JPH01232750A (en) * 1988-03-12 1989-09-18 Fujitsu Ltd Manufacture of laminated soi substrate
JPH0311217A (en) * 1989-06-07 1991-01-18 Kawasaki Steel Corp Operation of plasma melting furnace
JPH0435044A (en) * 1990-05-31 1992-02-05 Seiko Instr Inc Manufacture of semiconductor substrate

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