JPS4838169A - - Google Patents
Info
- Publication number
- JPS4838169A JPS4838169A JP7118971A JP7118971A JPS4838169A JP S4838169 A JPS4838169 A JP S4838169A JP 7118971 A JP7118971 A JP 7118971A JP 7118971 A JP7118971 A JP 7118971A JP S4838169 A JPS4838169 A JP S4838169A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7118971A JPS4838169A (enrdf_load_html_response) | 1971-09-16 | 1971-09-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7118971A JPS4838169A (enrdf_load_html_response) | 1971-09-16 | 1971-09-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4838169A true JPS4838169A (enrdf_load_html_response) | 1973-06-05 |
Family
ID=13453449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7118971A Pending JPS4838169A (enrdf_load_html_response) | 1971-09-16 | 1971-09-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4838169A (enrdf_load_html_response) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4615620A (en) * | 1983-12-26 | 1986-10-07 | Hitachi, Ltd. | Apparatus for measuring the depth of fine engraved patterns |
JPS6350706A (ja) * | 1986-08-21 | 1988-03-03 | Chino Corp | 膜厚測定装置 |
JPS6350705A (ja) * | 1986-08-21 | 1988-03-03 | Chino Corp | 膜厚測定装置 |
WO1989002572A1 (en) * | 1987-09-18 | 1989-03-23 | Ricoh Company Ltd. | Method and apparatus for measuring refractive index and film thickness |
USRE33424E (en) * | 1983-12-26 | 1990-11-06 | Hitachi, Ltd. | Apparatus and method for measuring the depth of fine engraved patterns |
JP2007183143A (ja) * | 2006-01-06 | 2007-07-19 | Moritex Corp | 光学式膜厚測定装置 |
-
1971
- 1971-09-16 JP JP7118971A patent/JPS4838169A/ja active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4615620A (en) * | 1983-12-26 | 1986-10-07 | Hitachi, Ltd. | Apparatus for measuring the depth of fine engraved patterns |
USRE33424E (en) * | 1983-12-26 | 1990-11-06 | Hitachi, Ltd. | Apparatus and method for measuring the depth of fine engraved patterns |
JPS6350706A (ja) * | 1986-08-21 | 1988-03-03 | Chino Corp | 膜厚測定装置 |
JPS6350705A (ja) * | 1986-08-21 | 1988-03-03 | Chino Corp | 膜厚測定装置 |
WO1989002572A1 (en) * | 1987-09-18 | 1989-03-23 | Ricoh Company Ltd. | Method and apparatus for measuring refractive index and film thickness |
US5034617A (en) * | 1987-09-18 | 1991-07-23 | Ricoh Company, Ltd. | Method and apparatus for measuring refractive index and thickness of film |
JP2007183143A (ja) * | 2006-01-06 | 2007-07-19 | Moritex Corp | 光学式膜厚測定装置 |