JPS4837081Y1 - - Google Patents

Info

Publication number
JPS4837081Y1
JPS4837081Y1 JP9105472U JP9105472U JPS4837081Y1 JP S4837081 Y1 JPS4837081 Y1 JP S4837081Y1 JP 9105472 U JP9105472 U JP 9105472U JP 9105472 U JP9105472 U JP 9105472U JP S4837081 Y1 JPS4837081 Y1 JP S4837081Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9105472U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9105472U priority Critical patent/JPS4837081Y1/ja
Publication of JPS4837081Y1 publication Critical patent/JPS4837081Y1/ja
Expired legal-status Critical Current

Links

Landscapes

  • Washing And Drying Of Tableware (AREA)
  • Nozzles (AREA)
JP9105472U 1972-08-01 1972-08-01 Expired JPS4837081Y1 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9105472U JPS4837081Y1 (enExample) 1972-08-01 1972-08-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9105472U JPS4837081Y1 (enExample) 1972-08-01 1972-08-01

Publications (1)

Publication Number Publication Date
JPS4837081Y1 true JPS4837081Y1 (enExample) 1973-11-05

Family

ID=33254865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9105472U Expired JPS4837081Y1 (enExample) 1972-08-01 1972-08-01

Country Status (1)

Country Link
JP (1) JPS4837081Y1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013239485A (ja) * 2012-05-11 2013-11-28 Tokyo Electron Ltd 可動ノズルおよび基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013239485A (ja) * 2012-05-11 2013-11-28 Tokyo Electron Ltd 可動ノズルおよび基板処理装置

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