JPS4834562A - - Google Patents
Info
- Publication number
- JPS4834562A JPS4834562A JP46068663A JP6866371A JPS4834562A JP S4834562 A JPS4834562 A JP S4834562A JP 46068663 A JP46068663 A JP 46068663A JP 6866371 A JP6866371 A JP 6866371A JP S4834562 A JPS4834562 A JP S4834562A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46068663A JPS4834562A (ja) | 1971-09-06 | 1971-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46068663A JPS4834562A (ja) | 1971-09-06 | 1971-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4834562A true JPS4834562A (ja) | 1973-05-19 |
Family
ID=13380159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46068663A Pending JPS4834562A (ja) | 1971-09-06 | 1971-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4834562A (ja) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50115065A (ja) * | 1974-02-20 | 1975-09-09 | ||
| JPS50115066A (ja) * | 1974-02-20 | 1975-09-09 | ||
| JPS50115865A (ja) * | 1974-02-25 | 1975-09-10 | ||
| JPS52263U (ja) * | 1975-06-20 | 1977-01-05 | ||
| JPS5210170A (en) * | 1975-07-14 | 1977-01-26 | Furuno Electric Co Ltd | Liquid surface detector |
| JPS539150A (en) * | 1976-07-12 | 1978-01-27 | Vni I K I Tsubetometoafutomach | Method of and apparatus for inspecting boundaries between gas and liquid or between liquid and liquid in single molecule layer storing tank |
| WO2023189761A1 (ja) * | 2022-03-30 | 2023-10-05 | 東京エレクトロン株式会社 | 液体を貯留する装置、基板を処理するシステム、及び液位を特定する方法 |
-
1971
- 1971-09-06 JP JP46068663A patent/JPS4834562A/ja active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50115065A (ja) * | 1974-02-20 | 1975-09-09 | ||
| JPS50115066A (ja) * | 1974-02-20 | 1975-09-09 | ||
| JPS556171B2 (ja) * | 1974-02-20 | 1980-02-14 | ||
| JPS556172B2 (ja) * | 1974-02-20 | 1980-02-14 | ||
| JPS50115865A (ja) * | 1974-02-25 | 1975-09-10 | ||
| JPS556173B2 (ja) * | 1974-02-25 | 1980-02-14 | ||
| JPS52263U (ja) * | 1975-06-20 | 1977-01-05 | ||
| JPS566905Y2 (ja) * | 1975-06-20 | 1981-02-16 | ||
| JPS5210170A (en) * | 1975-07-14 | 1977-01-26 | Furuno Electric Co Ltd | Liquid surface detector |
| JPS539150A (en) * | 1976-07-12 | 1978-01-27 | Vni I K I Tsubetometoafutomach | Method of and apparatus for inspecting boundaries between gas and liquid or between liquid and liquid in single molecule layer storing tank |
| JPS628726B2 (ja) * | 1976-07-12 | 1987-02-24 | Fuseso* Nauchino Isusuredo* I Konsuto* Inst Tsubetometoafutomachika | |
| WO2023189761A1 (ja) * | 2022-03-30 | 2023-10-05 | 東京エレクトロン株式会社 | 液体を貯留する装置、基板を処理するシステム、及び液位を特定する方法 |