JPS4834352A - - Google Patents

Info

Publication number
JPS4834352A
JPS4834352A JP6939371A JP6939371A JPS4834352A JP S4834352 A JPS4834352 A JP S4834352A JP 6939371 A JP6939371 A JP 6939371A JP 6939371 A JP6939371 A JP 6939371A JP S4834352 A JPS4834352 A JP S4834352A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6939371A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6939371A priority Critical patent/JPS4834352A/ja
Publication of JPS4834352A publication Critical patent/JPS4834352A/ja
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B15/00Sorption machines, plants or systems, operating continuously, e.g. absorption type
    • F25B15/10Sorption machines, plants or systems, operating continuously, e.g. absorption type with inert gas

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Defrosting Systems (AREA)
  • Sorption Type Refrigeration Machines (AREA)
JP6939371A 1971-09-07 1971-09-07 Pending JPS4834352A (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6939371A JPS4834352A (enExample) 1971-09-07 1971-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6939371A JPS4834352A (enExample) 1971-09-07 1971-09-07

Publications (1)

Publication Number Publication Date
JPS4834352A true JPS4834352A (enExample) 1973-05-18

Family

ID=13401298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6939371A Pending JPS4834352A (enExample) 1971-09-07 1971-09-07

Country Status (1)

Country Link
JP (1) JPS4834352A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248471A (en) * 1975-10-16 1977-04-18 Nisshin Haiboruteeji Kk Ion implantation device
JPS55160429A (en) * 1979-05-31 1980-12-13 Jeol Ltd Method for electron beam exposure
JPS56142753U (enExample) * 1980-03-28 1981-10-28
JPS56138925A (en) * 1980-03-31 1981-10-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS63107014A (ja) * 1986-05-20 1988-05-12 Fujitsu Ltd ウエハ−の識別方法とこれを適用せる半導体装置の製造方法
JP2012056352A (ja) * 2010-09-06 2012-03-22 Toyota Motor Corp 冷却装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248471A (en) * 1975-10-16 1977-04-18 Nisshin Haiboruteeji Kk Ion implantation device
JPS55160429A (en) * 1979-05-31 1980-12-13 Jeol Ltd Method for electron beam exposure
JPS56142753U (enExample) * 1980-03-28 1981-10-28
JPS56138925A (en) * 1980-03-31 1981-10-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS63107014A (ja) * 1986-05-20 1988-05-12 Fujitsu Ltd ウエハ−の識別方法とこれを適用せる半導体装置の製造方法
JP2012056352A (ja) * 2010-09-06 2012-03-22 Toyota Motor Corp 冷却装置

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