JPS4829808U - - Google Patents
Info
- Publication number
- JPS4829808U JPS4829808U JP7235871U JP7235871U JPS4829808U JP S4829808 U JPS4829808 U JP S4829808U JP 7235871 U JP7235871 U JP 7235871U JP 7235871 U JP7235871 U JP 7235871U JP S4829808 U JPS4829808 U JP S4829808U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7235871U JPS5112084Y2 (ja) | 1971-08-12 | 1971-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7235871U JPS5112084Y2 (ja) | 1971-08-12 | 1971-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4829808U true JPS4829808U (ja) | 1973-04-12 |
| JPS5112084Y2 JPS5112084Y2 (ja) | 1976-04-01 |
Family
ID=27971354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7235871U Expired JPS5112084Y2 (ja) | 1971-08-12 | 1971-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5112084Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62272441A (ja) * | 1986-05-20 | 1987-11-26 | Tokyo Electron Ltd | イオン注入装置におけるウエハ保持装置 |
-
1971
- 1971-08-12 JP JP7235871U patent/JPS5112084Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62272441A (ja) * | 1986-05-20 | 1987-11-26 | Tokyo Electron Ltd | イオン注入装置におけるウエハ保持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5112084Y2 (ja) | 1976-04-01 |