JPS4828530B1 - - Google Patents
Info
- Publication number
- JPS4828530B1 JPS4828530B1 JP3083568A JP3083568A JPS4828530B1 JP S4828530 B1 JPS4828530 B1 JP S4828530B1 JP 3083568 A JP3083568 A JP 3083568A JP 3083568 A JP3083568 A JP 3083568A JP S4828530 B1 JPS4828530 B1 JP S4828530B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Chemical Vapour Deposition (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES0111390 | 1967-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4828530B1 true JPS4828530B1 (enrdf_load_stackoverflow) | 1973-09-03 |
Family
ID=7530907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3083568A Pending JPS4828530B1 (enrdf_load_stackoverflow) | 1967-08-17 | 1968-05-08 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS4828530B1 (enrdf_load_stackoverflow) |
| DE (1) | DE1644016A1 (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4846236U (enrdf_load_stackoverflow) * | 1971-10-01 | 1973-06-16 | ||
| JPS495740U (enrdf_load_stackoverflow) * | 1972-04-14 | 1974-01-18 | ||
| JPS4928236U (enrdf_load_stackoverflow) * | 1972-06-13 | 1974-03-11 | ||
| JPS5061428U (enrdf_load_stackoverflow) * | 1973-10-01 | 1975-06-05 |
-
1967
- 1967-08-17 DE DE19671644016 patent/DE1644016A1/de active Pending
-
1968
- 1968-05-08 JP JP3083568A patent/JPS4828530B1/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4846236U (enrdf_load_stackoverflow) * | 1971-10-01 | 1973-06-16 | ||
| JPS495740U (enrdf_load_stackoverflow) * | 1972-04-14 | 1974-01-18 | ||
| JPS4928236U (enrdf_load_stackoverflow) * | 1972-06-13 | 1974-03-11 | ||
| JPS5061428U (enrdf_load_stackoverflow) * | 1973-10-01 | 1975-06-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE1644016A1 (de) | 1970-07-02 |