JPS4828121B1 - - Google Patents
Info
- Publication number
- JPS4828121B1 JPS4828121B1 JP5304970A JP5304970A JPS4828121B1 JP S4828121 B1 JPS4828121 B1 JP S4828121B1 JP 5304970 A JP5304970 A JP 5304970A JP 5304970 A JP5304970 A JP 5304970A JP S4828121 B1 JPS4828121 B1 JP S4828121B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5304970A JPS4828121B1 (enExample) | 1970-06-18 | 1970-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5304970A JPS4828121B1 (enExample) | 1970-06-18 | 1970-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4828121B1 true JPS4828121B1 (enExample) | 1973-08-29 |
Family
ID=12931994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5304970A Pending JPS4828121B1 (enExample) | 1970-06-18 | 1970-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4828121B1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63188378U (enExample) * | 1987-05-27 | 1988-12-02 | ||
| JP2014042003A (ja) * | 2012-07-03 | 2014-03-06 | Spts Technologies Ltd | エッチングの方法 |
-
1970
- 1970-06-18 JP JP5304970A patent/JPS4828121B1/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63188378U (enExample) * | 1987-05-27 | 1988-12-02 | ||
| JP2014042003A (ja) * | 2012-07-03 | 2014-03-06 | Spts Technologies Ltd | エッチングの方法 |