JPS4826424A - - Google Patents

Info

Publication number
JPS4826424A
JPS4826424A JP46061172A JP6117271A JPS4826424A JP S4826424 A JPS4826424 A JP S4826424A JP 46061172 A JP46061172 A JP 46061172A JP 6117271 A JP6117271 A JP 6117271A JP S4826424 A JPS4826424 A JP S4826424A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP46061172A
Other languages
Japanese (ja)
Other versions
JPS5418082B2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6117271A priority Critical patent/JPS5418082B2/ja
Publication of JPS4826424A publication Critical patent/JPS4826424A/ja
Publication of JPS5418082B2 publication Critical patent/JPS5418082B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Transforming Light Signals Into Electric Signals (AREA)
JP6117271A 1971-08-11 1971-08-11 Expired JPS5418082B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6117271A JPS5418082B2 (https=) 1971-08-11 1971-08-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6117271A JPS5418082B2 (https=) 1971-08-11 1971-08-11

Publications (2)

Publication Number Publication Date
JPS4826424A true JPS4826424A (https=) 1973-04-07
JPS5418082B2 JPS5418082B2 (https=) 1979-07-05

Family

ID=13163445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6117271A Expired JPS5418082B2 (https=) 1971-08-11 1971-08-11

Country Status (1)

Country Link
JP (1) JPS5418082B2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50125670A (https=) * 1974-03-20 1975-10-02
JPS5376759A (en) * 1976-12-20 1978-07-07 Ibm Ion implantation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50125670A (https=) * 1974-03-20 1975-10-02
JPS5376759A (en) * 1976-12-20 1978-07-07 Ibm Ion implantation device

Also Published As

Publication number Publication date
JPS5418082B2 (https=) 1979-07-05

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