JPS4826424A - - Google Patents

Info

Publication number
JPS4826424A
JPS4826424A JP46061172A JP6117271A JPS4826424A JP S4826424 A JPS4826424 A JP S4826424A JP 46061172 A JP46061172 A JP 46061172A JP 6117271 A JP6117271 A JP 6117271A JP S4826424 A JPS4826424 A JP S4826424A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP46061172A
Other languages
Japanese (ja)
Other versions
JPS5418082B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6117271A priority Critical patent/JPS5418082B2/ja
Publication of JPS4826424A publication Critical patent/JPS4826424A/ja
Publication of JPS5418082B2 publication Critical patent/JPS5418082B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Transforming Light Signals Into Electric Signals (AREA)
JP6117271A 1971-08-11 1971-08-11 Expired JPS5418082B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6117271A JPS5418082B2 (enExample) 1971-08-11 1971-08-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6117271A JPS5418082B2 (enExample) 1971-08-11 1971-08-11

Publications (2)

Publication Number Publication Date
JPS4826424A true JPS4826424A (enExample) 1973-04-07
JPS5418082B2 JPS5418082B2 (enExample) 1979-07-05

Family

ID=13163445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6117271A Expired JPS5418082B2 (enExample) 1971-08-11 1971-08-11

Country Status (1)

Country Link
JP (1) JPS5418082B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50125670A (enExample) * 1974-03-20 1975-10-02
JPS5376759A (en) * 1976-12-20 1978-07-07 Ibm Ion implantation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50125670A (enExample) * 1974-03-20 1975-10-02
JPS5376759A (en) * 1976-12-20 1978-07-07 Ibm Ion implantation device

Also Published As

Publication number Publication date
JPS5418082B2 (enExample) 1979-07-05

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