JPS4825359A - - Google Patents
Info
- Publication number
- JPS4825359A JPS4825359A JP6089771A JP6089771A JPS4825359A JP S4825359 A JPS4825359 A JP S4825359A JP 6089771 A JP6089771 A JP 6089771A JP 6089771 A JP6089771 A JP 6089771A JP S4825359 A JPS4825359 A JP S4825359A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Air-Flow Control Members (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6089771A JPS516989B2 (https=) | 1971-08-10 | 1971-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6089771A JPS516989B2 (https=) | 1971-08-10 | 1971-08-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4825359A true JPS4825359A (https=) | 1973-04-02 |
| JPS516989B2 JPS516989B2 (https=) | 1976-03-03 |
Family
ID=13155592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6089771A Expired JPS516989B2 (https=) | 1971-08-10 | 1971-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS516989B2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5015339A (https=) * | 1973-05-07 | 1975-02-18 | ||
| JPS5854632A (ja) * | 1981-09-29 | 1983-03-31 | Toshiba Corp | 電子ビ−ム露光方式 |
-
1971
- 1971-08-10 JP JP6089771A patent/JPS516989B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5015339A (https=) * | 1973-05-07 | 1975-02-18 | ||
| JPS5854632A (ja) * | 1981-09-29 | 1983-03-31 | Toshiba Corp | 電子ビ−ム露光方式 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS516989B2 (https=) | 1976-03-03 |