JPS4824667B1 - - Google Patents

Info

Publication number
JPS4824667B1
JPS4824667B1 JP10067270A JP10067270A JPS4824667B1 JP S4824667 B1 JPS4824667 B1 JP S4824667B1 JP 10067270 A JP10067270 A JP 10067270A JP 10067270 A JP10067270 A JP 10067270A JP S4824667 B1 JPS4824667 B1 JP S4824667B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10067270A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4824667B1 publication Critical patent/JPS4824667B1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/18—Controlling or regulating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP10067270A 1969-11-13 1970-11-10 Pending JPS4824667B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US87647669A 1969-11-13 1969-11-13

Publications (1)

Publication Number Publication Date
JPS4824667B1 true JPS4824667B1 (ja) 1973-07-23

Family

ID=25367803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10067270A Pending JPS4824667B1 (ja) 1969-11-13 1970-11-10

Country Status (3)

Country Link
JP (1) JPS4824667B1 (ja)
DE (1) DE2051992B2 (ja)
NL (1) NL7013328A (ja)

Also Published As

Publication number Publication date
DE2051992A1 (en) 1971-07-15
DE2051992B2 (de) 1976-06-16
NL7013328A (ja) 1971-05-17

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