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Publication of JPS4823478B1publicationCriticalpatent/JPS4823478B1/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J49/00—Particle spectrometers or separator tubes
H01J49/02—Details
H01J49/10—Ion sources; Ion guns
H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J49/00—Particle spectrometers or separator tubes
H01J49/02—Details
H01J49/10—Ion sources; Ion guns
H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
H01J49/145—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using chemical ionisation
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Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Physics & Mathematics
(AREA)
Engineering & Computer Science
(AREA)
Plasma & Fusion
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)
Other Investigation Or Analysis Of Materials By Electrical Means
(AREA)