JPS4819988B1 - - Google Patents
Info
- Publication number
- JPS4819988B1 JPS4819988B1 JP4710568A JP4710568A JPS4819988B1 JP S4819988 B1 JPS4819988 B1 JP S4819988B1 JP 4710568 A JP4710568 A JP 4710568A JP 4710568 A JP4710568 A JP 4710568A JP S4819988 B1 JPS4819988 B1 JP S4819988B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Discharge By Other Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4710568A JPS4819988B1 (ja) | 1968-07-08 | 1968-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4710568A JPS4819988B1 (ja) | 1968-07-08 | 1968-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4819988B1 true JPS4819988B1 (ja) | 1973-06-18 |
Family
ID=12765883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4710568A Pending JPS4819988B1 (ja) | 1968-07-08 | 1968-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4819988B1 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020192622A (ja) * | 2019-05-26 | 2020-12-03 | 大船企業日本株式会社 | 基板の供給及び回収方法と、該各方法の実施にそれぞれ供する加工前基板供給装置及び加工後基板回収装置、並びに該加工前基板供給装置と加工後基板回収装置とを備える基板搬送装置。 |
-
1968
- 1968-07-08 JP JP4710568A patent/JPS4819988B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020192622A (ja) * | 2019-05-26 | 2020-12-03 | 大船企業日本株式会社 | 基板の供給及び回収方法と、該各方法の実施にそれぞれ供する加工前基板供給装置及び加工後基板回収装置、並びに該加工前基板供給装置と加工後基板回収装置とを備える基板搬送装置。 |