JPS4817890U - - Google Patents

Info

Publication number
JPS4817890U
JPS4817890U JP6184771U JP6184771U JPS4817890U JP S4817890 U JPS4817890 U JP S4817890U JP 6184771 U JP6184771 U JP 6184771U JP 6184771 U JP6184771 U JP 6184771U JP S4817890 U JPS4817890 U JP S4817890U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6184771U
Other languages
Japanese (ja)
Other versions
JPS5035518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6184771U priority Critical patent/JPS5035518Y2/ja
Publication of JPS4817890U publication Critical patent/JPS4817890U/ja
Application granted granted Critical
Publication of JPS5035518Y2 publication Critical patent/JPS5035518Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Screw Conveyors (AREA)
JP6184771U 1971-07-13 1971-07-13 Expired JPS5035518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6184771U JPS5035518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-07-13 1971-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6184771U JPS5035518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-07-13 1971-07-13

Publications (2)

Publication Number Publication Date
JPS4817890U true JPS4817890U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-02-28
JPS5035518Y2 JPS5035518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-10-16

Family

ID=27951612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6184771U Expired JPS5035518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-07-13 1971-07-13

Country Status (1)

Country Link
JP (1) JPS5035518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4968356U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-09-30 1974-06-14
JPS50110151U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-02-19 1975-09-09
JPS5281045U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-12-13 1977-06-16
US12288663B2 (en) 2017-04-11 2025-04-29 Asml Netherlands B.V. Charged particle source module

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4968356U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-09-30 1974-06-14
JPS50110151U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-02-19 1975-09-09
JPS5281045U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-12-13 1977-06-16
US12288663B2 (en) 2017-04-11 2025-04-29 Asml Netherlands B.V. Charged particle source module

Also Published As

Publication number Publication date
JPS5035518Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-10-16

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