JPS48104526A - - Google Patents
Info
- Publication number
- JPS48104526A JPS48104526A JP47038096A JP3809672A JPS48104526A JP S48104526 A JPS48104526 A JP S48104526A JP 47038096 A JP47038096 A JP 47038096A JP 3809672 A JP3809672 A JP 3809672A JP S48104526 A JPS48104526 A JP S48104526A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47038096A JPH027046B2 (https=) | 1972-04-13 | 1972-04-13 | |
| US304841A US3871764A (en) | 1972-04-05 | 1972-11-08 | Pattern generator apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47038096A JPH027046B2 (https=) | 1972-04-13 | 1972-04-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS48104526A true JPS48104526A (https=) | 1973-12-27 |
| JPH027046B2 JPH027046B2 (https=) | 1990-02-15 |
Family
ID=12515931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47038096A Expired - Lifetime JPH027046B2 (https=) | 1972-04-05 | 1972-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH027046B2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59164514A (ja) * | 1983-03-10 | 1984-09-17 | Nippon Kogaku Kk <Nikon> | 焦点合わせ装置 |
| JPS60257305A (ja) * | 1984-06-02 | 1985-12-19 | Fuji Giken Kk | イメ−ジセンサ |
| JPH08102441A (ja) * | 1995-07-28 | 1996-04-16 | Canon Inc | 投影露光装置 |
-
1972
- 1972-04-13 JP JP47038096A patent/JPH027046B2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59164514A (ja) * | 1983-03-10 | 1984-09-17 | Nippon Kogaku Kk <Nikon> | 焦点合わせ装置 |
| JPS60257305A (ja) * | 1984-06-02 | 1985-12-19 | Fuji Giken Kk | イメ−ジセンサ |
| JPH08102441A (ja) * | 1995-07-28 | 1996-04-16 | Canon Inc | 投影露光装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH027046B2 (https=) | 1990-02-15 |