JPS48103471A - - Google Patents

Info

Publication number
JPS48103471A
JPS48103471A JP3780972A JP3780972A JPS48103471A JP S48103471 A JPS48103471 A JP S48103471A JP 3780972 A JP3780972 A JP 3780972A JP 3780972 A JP3780972 A JP 3780972A JP S48103471 A JPS48103471 A JP S48103471A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3780972A
Other languages
Japanese (ja)
Other versions
JPS5127226B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47037809A priority Critical patent/JPS5127226B2/ja
Publication of JPS48103471A publication Critical patent/JPS48103471A/ja
Publication of JPS5127226B2 publication Critical patent/JPS5127226B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP47037809A 1972-04-17 1972-04-17 Expired JPS5127226B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47037809A JPS5127226B2 (enrdf_load_stackoverflow) 1972-04-17 1972-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47037809A JPS5127226B2 (enrdf_load_stackoverflow) 1972-04-17 1972-04-17

Publications (2)

Publication Number Publication Date
JPS48103471A true JPS48103471A (enrdf_load_stackoverflow) 1973-12-25
JPS5127226B2 JPS5127226B2 (enrdf_load_stackoverflow) 1976-08-11

Family

ID=12507825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47037809A Expired JPS5127226B2 (enrdf_load_stackoverflow) 1972-04-17 1972-04-17

Country Status (1)

Country Link
JP (1) JPS5127226B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6455085U (enrdf_load_stackoverflow) * 1987-10-02 1989-04-05

Also Published As

Publication number Publication date
JPS5127226B2 (enrdf_load_stackoverflow) 1976-08-11

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