JPS48103274A - - Google Patents

Info

Publication number
JPS48103274A
JPS48103274A JP3809872A JP3809872A JPS48103274A JP S48103274 A JPS48103274 A JP S48103274A JP 3809872 A JP3809872 A JP 3809872A JP 3809872 A JP3809872 A JP 3809872A JP S48103274 A JPS48103274 A JP S48103274A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3809872A
Other languages
Japanese (ja)
Other versions
JPS5648868B2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3809872A priority Critical patent/JPS5648868B2/ja
Priority to US304841A priority patent/US3871764A/en
Publication of JPS48103274A publication Critical patent/JPS48103274A/ja
Publication of JPS5648868B2 publication Critical patent/JPS5648868B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP3809872A 1972-04-05 1972-04-13 Expired JPS5648868B2 (enrdf_load_html_response)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3809872A JPS5648868B2 (enrdf_load_html_response) 1972-04-13 1972-04-13
US304841A US3871764A (en) 1972-04-05 1972-11-08 Pattern generator apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3809872A JPS5648868B2 (enrdf_load_html_response) 1972-04-13 1972-04-13

Publications (2)

Publication Number Publication Date
JPS48103274A true JPS48103274A (enrdf_load_html_response) 1973-12-25
JPS5648868B2 JPS5648868B2 (enrdf_load_html_response) 1981-11-18

Family

ID=12515989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3809872A Expired JPS5648868B2 (enrdf_load_html_response) 1972-04-05 1972-04-13

Country Status (1)

Country Link
JP (1) JPS5648868B2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5648868B2 (enrdf_load_html_response) 1981-11-18

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