JPS48103088A - - Google Patents

Info

Publication number
JPS48103088A
JPS48103088A JP3604772A JP3604772A JPS48103088A JP S48103088 A JPS48103088 A JP S48103088A JP 3604772 A JP3604772 A JP 3604772A JP 3604772 A JP3604772 A JP 3604772A JP S48103088 A JPS48103088 A JP S48103088A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3604772A
Other languages
Japanese (ja)
Other versions
JPS568105B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3604772A priority Critical patent/JPS568105B2/ja
Publication of JPS48103088A publication Critical patent/JPS48103088A/ja
Publication of JPS568105B2 publication Critical patent/JPS568105B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP3604772A 1972-04-12 1972-04-12 Expired JPS568105B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3604772A JPS568105B2 (enrdf_load_stackoverflow) 1972-04-12 1972-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3604772A JPS568105B2 (enrdf_load_stackoverflow) 1972-04-12 1972-04-12

Publications (2)

Publication Number Publication Date
JPS48103088A true JPS48103088A (enrdf_load_stackoverflow) 1973-12-24
JPS568105B2 JPS568105B2 (enrdf_load_stackoverflow) 1981-02-21

Family

ID=12458783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3604772A Expired JPS568105B2 (enrdf_load_stackoverflow) 1972-04-12 1972-04-12

Country Status (1)

Country Link
JP (1) JPS568105B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55118630A (en) * 1979-03-03 1980-09-11 Heraeus Schott Quarzschmelze Quartz glass bellljar container for semiconductor technique
JPS59220916A (ja) * 1983-05-31 1984-12-12 Toshiba Corp 気相成長方法及び装置
JPS6390828U (enrdf_load_stackoverflow) * 1986-12-03 1988-06-13

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55118630A (en) * 1979-03-03 1980-09-11 Heraeus Schott Quarzschmelze Quartz glass bellljar container for semiconductor technique
JPS59220916A (ja) * 1983-05-31 1984-12-12 Toshiba Corp 気相成長方法及び装置
JPS6390828U (enrdf_load_stackoverflow) * 1986-12-03 1988-06-13

Also Published As

Publication number Publication date
JPS568105B2 (enrdf_load_stackoverflow) 1981-02-21

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