JPS48103043A - - Google Patents
Info
- Publication number
- JPS48103043A JPS48103043A JP3642072A JP3642072A JPS48103043A JP S48103043 A JPS48103043 A JP S48103043A JP 3642072 A JP3642072 A JP 3642072A JP 3642072 A JP3642072 A JP 3642072A JP S48103043 A JPS48103043 A JP S48103043A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/28—Acidic compositions for etching iron group metals
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3642072A JPS5419381B2 (en) | 1972-04-13 | 1972-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3642072A JPS5419381B2 (en) | 1972-04-13 | 1972-04-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS48103043A true JPS48103043A (en) | 1973-12-24 |
| JPS5419381B2 JPS5419381B2 (en) | 1979-07-14 |
Family
ID=12469321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3642072A Expired JPS5419381B2 (en) | 1972-04-13 | 1972-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5419381B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8652972B2 (en) | 2005-08-12 | 2014-02-18 | Basf Aktiengesellschaft | Stabilized etching solutions for CU and CU/NI layers |
-
1972
- 1972-04-13 JP JP3642072A patent/JPS5419381B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8652972B2 (en) | 2005-08-12 | 2014-02-18 | Basf Aktiengesellschaft | Stabilized etching solutions for CU and CU/NI layers |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5419381B2 (en) | 1979-07-14 |