JPS48101084A - - Google Patents
Info
- Publication number
- JPS48101084A JPS48101084A JP3169672A JP3169672A JPS48101084A JP S48101084 A JPS48101084 A JP S48101084A JP 3169672 A JP3169672 A JP 3169672A JP 3169672 A JP3169672 A JP 3169672A JP S48101084 A JPS48101084 A JP S48101084A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3169672A JPS5636570B2 (enExample) | 1972-03-31 | 1972-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3169672A JPS5636570B2 (enExample) | 1972-03-31 | 1972-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS48101084A true JPS48101084A (enExample) | 1973-12-20 |
| JPS5636570B2 JPS5636570B2 (enExample) | 1981-08-25 |
Family
ID=12338226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3169672A Expired JPS5636570B2 (enExample) | 1972-03-31 | 1972-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5636570B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5386580A (en) * | 1977-01-10 | 1978-07-31 | Hitachi Ltd | Treating method of semiconductor complex |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3042593A (en) * | 1957-09-23 | 1962-07-03 | Philco Corp | Electrochemical method for cleansing semiconductive devices |
-
1972
- 1972-03-31 JP JP3169672A patent/JPS5636570B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3042593A (en) * | 1957-09-23 | 1962-07-03 | Philco Corp | Electrochemical method for cleansing semiconductive devices |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5386580A (en) * | 1977-01-10 | 1978-07-31 | Hitachi Ltd | Treating method of semiconductor complex |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5636570B2 (enExample) | 1981-08-25 |